EP3587525
LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING
:
EP einkaleyfi: Þýðing ekki lögð inn:
1.7.2019:
22.11.2023:
19183705.3
:
30.6.2039
:
LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING
1.7.2019
22.11.2023
:
Versum Materials US, LLC:
8555 S. River Parkway, Tempe, AZ 85284, US
:
SHI, Xiaobo:
Tempe, Arizona 85284, US
:
MURELLA, Krishna, P.:
Tempe, Arizona 85284, US
:
ROSE, Joseph, D.:
Tempe, Arizona 85284, US
:
ZHOU, Hongjun:
Tempe, Arizona 85284, US
:
O'NEILL, Mark, Leonard:
Tempe, Arizona 85284, US
:
201862692639 P:
29.6.2018:
US
:
201862692633 P:
29.6.2018:
US
:
201916450784:
24.6.2019:
US
:
C09G 1/02, H01L 21/3105