EP3587525
LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
1.7.2019EP published:
22.11.2023EP application number:
19183705.3
EPO information:
European Patent Register
Max expiry date:
30.6.2039
Title in English:
LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHINGLanguage of the patent:
English
Timeline
Today
1.7.2019EP application
22.11.2023EP Publication
Owner
Name:
Versum Materials US, LLCAddress:
8555 S. River Parkway, Tempe, AZ 85284, US
Inventor
Name:
SHI, XiaoboAddress:
Tempe, Arizona 85284, US
Name:
MURELLA, Krishna, P.Address:
Tempe, Arizona 85284, US
Name:
ROSE, Joseph, D.Address:
Tempe, Arizona 85284, US
Name:
ZHOU, HongjunAddress:
Tempe, Arizona 85284, US
Name:
O'NEILL, Mark, LeonardAddress:
Tempe, Arizona 85284, US
Priority
Number:
201862692639 PDate:
29.6.2018Country:
US
Number:
201862692633 PDate:
29.6.2018Country:
US
Number:
201916450784Date:
24.6.2019Country:
US
Classification
Categories:
C09G 1/02, H01L 21/3105