EP3594988
HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAME
:
EP einkaleyfi: Þýðing ekki lögð inn:
1.7.2019:
1.1.2025:
19183682.4
:
30.6.2039
:
HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAME
1.7.2019
1.1.2025
:
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH:
Ammerthalstrasse 20, 85551 Heimstetten, DE
:
Adamec, Pavel:
85540 Haar, DE
:
201816033987:
12.7.2018:
US
:
H01J 37/28, H01J 37/09, H01J 37/141, H01J 37/317