EP3594988
HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAME
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
1.7.2019EP published:
1.1.2025EP application number:
19183682.4
EPO information:
European Patent Register
Max expiry date:
30.6.2039
Title in English:
HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAMELanguage of the patent:
English
Timeline
Today
1.7.2019EP application
1.1.2025EP Publication
Owner
Name:
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHAddress:
Ammerthalstrasse 20, 85551 Heimstetten, DE
Inventor
Name:
Adamec, PavelAddress:
85540 Haar, DE
Priority
Number:
201816033987Date:
12.7.2018Country:
US
Classification
Categories:
H01J 37/28, H01J 37/09, H01J 37/141, H01J 37/317