EP3647384
SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS
:
EP einkaleyfi: Þýðing ekki lögð inn:
31.10.2019:
12.6.2024:
19206672.8
:
30.10.2039
:
SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS
31.10.2019
12.6.2024
:
Versum Materials US, LLC:
8555 S. River Parkway, Tempe, AZ 85284, US
:
SHI, Xiaobo:
Tempe, Arizona 85284, US
:
MURELLA, Krishna P.:
Tempe, Arizona 85284, US
:
ROSE, Joseph D:
Tempe, Arizona 85284, US
:
ZHOU, Hongjun:
Tempe, Arizona 85284, US
:
O'NEILL, Mark Leonard:
Tempe, Arizona 85284, US
:
201862753431 P:
31.10.2018:
US
:
201916664924:
27.10.2019:
US
:
C09G 1/02, C09K 3/14, H01L 21/3105