EP3647384
SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
31.10.2019EP published:
12.6.2024EP application number:
19206672.8
EPO information:
European Patent Register
Max expiry date:
30.10.2039
Title in English:
SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESSLanguage of the patent:
English
Timeline
Today
31.10.2019EP application
12.6.2024EP Publication
Owner
Name:
Versum Materials US, LLCAddress:
8555 S. River Parkway, Tempe, AZ 85284, US
Inventor
Name:
SHI, XiaoboAddress:
Tempe, Arizona 85284, US
Name:
MURELLA, Krishna P.Address:
Tempe, Arizona 85284, US
Name:
ROSE, Joseph DAddress:
Tempe, Arizona 85284, US
Name:
ZHOU, HongjunAddress:
Tempe, Arizona 85284, US
Name:
O'NEILL, Mark LeonardAddress:
Tempe, Arizona 85284, US
Priority
Number:
201862753431 PDate:
31.10.2018Country:
US
Number:
201916664924Date:
27.10.2019Country:
US
Classification
Categories:
C09G 1/02, C09K 3/14, H01L 21/3105