EP3647460
THIN FILM PRODUCTION METHOD AND NOVEL COMPOUND
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
17.5.2018EP published:
12.4.2023EP application number:
18823105.4
EPO information:
European Patent Register
Max expiry date:
16.5.2038
Title in English:
THIN FILM PRODUCTION METHOD AND NOVEL COMPOUNDLanguage of the patent:
English
Timeline
Today
17.5.2018EP application
12.4.2023EP Publication
Owner
Name:
Adeka CorporationAddress:
2-35, Higashiogu 7-chome Arakawa-ku, Tokyo 116-8554, JP
Inventor
Name:
NISHIDA, AkihiroAddress:
Tokyo 116-8554, JP
Name:
OKADA, NanaAddress:
Tokyo 116-8554, JP
Name:
OOE, YoshikiAddress:
Tokyo 116-8554, JP
Priority
Number:
2017127401Date:
29.6.2017Country:
JP
Classification
Categories:
C23C 16/32, C23C 16/455