EP3652778
GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
14.6.2018EP published:
9.8.2023EP application number:
18831823.2
EPO information:
European Patent Register
Max expiry date:
13.6.2038
Title in English:
GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBERLanguage of the patent:
English
Timeline
Today
14.6.2018EP application
9.8.2023EP Publication
Owner
Name:
Micromaterials LLCAddress:
2711 Centerville Road Suite 400, Wilmington, Delaware 19808, US
Inventor
Name:
KHAN, AdibAddress:
Santa Clara California 95054, US
Name:
LIANG, QiweiAddress:
Fremont California 94536, US
Name:
MALIK, SultanAddress:
Sacramento California 95834, US
Name:
WONG, Keith TatseunAddress:
Los Gatos California 95032, US
Name:
NEMANI, Srinivas D.Address:
Sunnyvale California 94087, US
Priority
Number:
201762532715 PDate:
14.7.2017Country:
US
Number:
201715835378Date:
7.12.2017Country:
US
Classification
Categories:
H01L 21/67