EP3862460

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

  • :
    EP einkaleyfi: Þýðing ekki lögð inn
  • :
    14.8.2014
  • :
    15.2.2023
  • :
    21158423.0
  • :
    13.8.2034
  • :
    SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

14.8.2014
15.2.2023
  • :
    Applied Materials, Inc.
  • :
    3050 Bowers Avenue, Santa Clara, CA 95054, US
  • :
    West, Brian T.
  • :
    San Jose, CA California 95130, US
  • :
    Cox, Michael S.
  • :
    Gilroy, CA California 95020, US
  • :
    Oh, Jeonghoon
  • :
    Saratoga, CA California 95070, US
  • :
    201361866006 P
  • :
    14.8.2013
  • :
    US
  • :
    C23C 14/34, H01J 37/34