EP3862460
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
14.8.2014EP published:
15.2.2023EP application number:
21158423.0
EPO information:
European Patent Register
Max expiry date:
13.8.2034
Title in English:
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVESLanguage of the patent:
English
Timeline
Today
14.8.2014EP application
15.2.2023EP Publication
Owner
Name:
Applied Materials, Inc.Address:
3050 Bowers Avenue, Santa Clara, CA 95054, US
Inventor
Name:
West, Brian T.Address:
San Jose, CA California 95130, US
Name:
Cox, Michael S.Address:
Gilroy, CA California 95020, US
Name:
Oh, JeonghoonAddress:
Saratoga, CA California 95070, US
Priority
Number:
201361866006 PDate:
14.8.2013Country:
US
Classification
Categories:
C23C 14/34, H01J 37/34