EP3890002
SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
6.11.2019EP published:
24.1.2024EP application number:
19902588.3
EPO information:
European Patent Register
Max expiry date:
5.11.2039
Title in English:
SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICELanguage of the patent:
English
Timeline
Today
6.11.2019EP application
24.1.2024EP Publication
Owner
Name:
Ias Inc.Address:
2-1, Hinohommachi 2-chome, Hino-shi, Tokyo 191-0011, JP
Inventor
Name:
KAWABATA, KatsuhikoAddress:
Hino-shi, Tokyo 191-0011, JP
Name:
LEE, SungjaeAddress:
Hino-shi, Tokyo 191-0011, JP
Name:
HAYASHI, TakumaAddress:
Hino-shi, Tokyo 191-0011, JP
Priority
Number:
2018242929Date:
26.12.2018Country:
JP
Classification
Categories:
H01L 21/66, G01N 1/28, G01N 1/32, G01N 21/94, G01N 21/95, G01N 35/10