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EP3997519

REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM

  • Status:
    EP einkaleyfi: Þýðing ekki lögð inn
  • EP appl. date:
    29.6.2020
  • EP published:
    29.11.2023
  • EP application number:
    20736296.3
  • Max expiry date:
    28.6.2040
  • Title in English:
    REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM
  • Language of the patent:
    English

Timeline

Today
29.6.2020EP application
29.11.2023EP Publication

Owner

  • Name:
    VISITECH AS
  • Address:
    P.O.Box 616, 3003 Drammen, NO

Inventor

  • Name:
    TAFJORD, Øyvind
  • Address:
    3150 Tolvsrød, NO
  • Name:
    JØRGENSEN, Trond
  • Address:
    3018 Drammen, NO
  • Name:
    KIRKHORN, Endre
  • Address:
    3031 Drammen, NO
  • Name:
    ALMEDAL, Roy
  • Address:
    3531 Krokkleiva, NO

Priority

  • Number:
    20190876
  • Date:
    11.7.2019
  • Country:
    NO

Classification

  • Categories:
    G03F 7/20, G03F 9/00

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