EP3997520
RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS
:
EP einkaleyfi: Þýðing ekki lögð inn:
6.7.2020:
20.12.2023:
20737150.1
:
5.7.2040
:
RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS
6.7.2020
20.12.2023
:
Merck Patent GmbH:
Frankfurter Strasse 250, 64293 Darmstadt, DE
:
RAHMAN, M. Dalil:
Branchburg, New Jersey 08876, US
:
MULLEN, Salem K.:
Branchburg, New Jersey 08876, US
:
CHO, JoonYeon:
Branchburg, New Jersey 08876, US
:
201962871346 P:
8.7.2019:
US
:
EP2020068936:
6.7.2020
:
G03F 7/42, G03F 7/09, H01L 21/02, H01L 21/027, H01L 21/311