EP3997520
RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
6.7.2020EP published:
20.12.2023EP application number:
20737150.1
EPO information:
European Patent Register
Max expiry date:
5.7.2040
Title in English:
RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTSLanguage of the patent:
English
Timeline
Today
6.7.2020EP application
20.12.2023EP Publication
Owner
Name:
Merck Patent GmbHAddress:
Frankfurter Strasse 250, 64293 Darmstadt, DE
Inventor
Name:
RAHMAN, M. DalilAddress:
Branchburg, New Jersey 08876, US
Name:
MULLEN, Salem K.Address:
Branchburg, New Jersey 08876, US
Name:
CHO, JoonYeonAddress:
Branchburg, New Jersey 08876, US
Priority
Number:
201962871346 PDate:
8.7.2019Country:
US
Classification
Categories:
G03F 7/42, G03F 7/09, H01L 21/02, H01L 21/027, H01L 21/311