EP4036647
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
4.1.2022EP published:
8.11.2023EP application number:
22150145.5
EPO information:
European Patent Register
Max expiry date:
3.1.2042
Title in English:
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHODLanguage of the patent:
English
Timeline
Today
4.1.2022EP application
8.11.2023EP Publication
Owner
Name:
CANON KABUSHIKI KAISHAAddress:
30-2 SHIMOMARUKO 3-CHOME, OHTA-KU Tokyo 146-8501, JP
Inventor
Name:
YAMAGUCHI, WataruAddress:
Ohta-ku, Tokyo, 146-8501, JP
Priority
Number:
2021013597Date:
29.1.2021Country:
JP
Classification
Categories:
G03F 7/20, G03F 9/00