EP4158293
METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
26.5.2021EP published:
3.7.2024EP application number:
21728653.3
EPO information:
European Patent Register
Max expiry date:
25.5.2041
Title in English:
METHOD AND VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLYLanguage of the patent:
English
Timeline
Today
26.5.2021EP application
3.7.2024EP Publication
Owner
Name:
Edwards Vacuum LLCAddress:
6416, Inducon Drive West, Sanborn, NY 14132, US
Inventor
Name:
FAULKNER, Budd EdwardAddress:
Hillsboro, Oregon 97124, US
Priority
Number:
202007793Date:
26.5.2020Country:
GB
Classification
Categories:
G01K 1/143, G01K 1/16